All six inch (220mm) and 8 inch (300mm) chucks manufactured by MC Systems, Inc. are typically spring mounted to a an electrically insulated base by three screws. Adjustment of these three screws will cause the chuck surface to tilt. Using these three screws, one can flatten (planarize) the chuck surface to + & - 0.0005”.

First, you must provide an indicator to sense the position of the surface of the chuck. This may be a dial indicator 1) mounted firmly to the prober platen or if the system has a high power microscope, one can use the depth of field 2) at high magnification which is simple and easy.

Move the chuck until one of the three adjustment screws is near the center of the platen opening. Using a dial indicator, place the indicator on the platen with the sensing arm lightly touching the surface of the chuck. Move the platen up or down until the dial indicator reads zero. Using the stage adjustments, move the chuck top so that the next counter clockwise screw adjustment is near the center of the chuck. If the dial indicator still reads zero then great, if not, use an Allen wrench in the adjustment screw to bring the dial indicator to zero. Use the same procedure to move to the third screw, and adjust it, if need be. There will be inter action between these adjustments, therefore, return to the starting position of the first setting, if this is not zero, then use the platen adjust to bring the dial indicator to zero. Repeat the previous procedure on the next two adjustment screws. The overall procedure may have to be repeated several times.