The Series 8830 DC Powered Hot Chuck Controller is a uniquely designed system utilizing DC linear power for the resistive heaters and forced cooling with either ambient air or a source of chilled air to be supplied by the user.  The 8836/38-200 models indicate a lower temperature range of a -65.0 C which is readout only.  The system as supplied is capable of operating at a -65.0 C but the chilling medium must be supplied by the user. 
 

The Model 8830 DC Powered Hot Chuck Controller is an electrically quiet, voltage proportional controlled power source for MC Systems' hot wafer chucks or hot socket card chucks. The Model 8830 has a true proportioning power source with a linear voltage output over the proportioning range. The voltage output of Model 8830 DC Powered Hot Chuck Controller is a straight-line function over the proportioning range. The proportional voltage output is applied to the resistive heaters in the wafer chuck or socket card chuck.

For example, at a set point of 100.0 degrees Centigrade and a proportioning range of 8.0 degrees Centigrade, the temperature controller output would be as follows. Below 96.0 degrees Centigrade, the voltage output would be at maximum, at 96.0 degree Centigrade the output would decrease in a linear fashion to a minimum, at 104.0 degrees Centigrade. Above 104.0, the heater power is off . Programming corrects for temperature offset.

The Controller features a 100-ohm platinum RTD temperature sensor in a three-wire bridge, to Analog Devices 5B RTD Signal Conditioner, to 12 Bit Analog to Digital Converter, to imbedded microprocessor, to 12 bit Digital to Analog Converter, to Linear Power Amplifier, and to Mica encased resistive heater.

Voltage corrections for temperature variations by the Model 8830 Controller are small and result in very little or no electrical noise appearing at the chuck across the resistive heaters. The maximum heater voltage ever applied to the chuck is about twenty-four volts DC. When at set point, typical heater voltage will be maintained around 10 VDC with only small corrections of about 100 millivolts for temperature variations.

The Model 8830 DC Powered Hot Chuck Controller has a quick cool capability. A solenoid valve whose mode of operation is optionally selected by the user may control a source of low-pressure shop air or Nitrogen Gas to the hot wafer chuck or hot socket card chuck. To further enhance chuck cool down characteristics, the Air/Nitrogen Gas may be chilled by passing copper coils through ice water, a refrigeration unit, or industry chillers. It is possible to do limited sub ambient probing in this mode. This chuck has been successfully operated at -65.0 C. Frost will be a problem unless extremely dry air or Nitrogen Gas (N2) is used as a temperature medium. Please contact factory for more information on this subject.

Model 8830 DC Hot Chuck Data Sheet (PDF)